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Trough type heterojunction pile cleaning machine

Trough type heterojunction pile cleaning machine

主要功能:

It is used to remove impurities on the surface of silicon wafer, form pyramid suede on the surface of silicon wafer and reduce the reflectivity of silicon wafer surface.



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Equipment performance

Capacity: up to 8000 Wafers / hour

Effective utilization rate of equipment: ≥ 97%

Fragment rate: M12 ≤ 0.01%

 

Silicon wafer specification

Silicon wafer thickness: ≥ 160 μ m

Silicon wafer size: 182 * 182-230 * 230mm

Flower basket type: low surface carrier (LSC) made by PVDF

Space between flower baskets: 4.76mm

Basket capacity: 100 wafers

 

Manipulator system

Manipulator: 8 sets

Servo motor: 16 PC

Lift time: less than 22 sec

 

Equipment size

Length * width * height: 27300 * 3200 * 2650mm


direction

Working direction：Left→Right  / Right→Left（TBD）

 

power supply

Power supply: AC380V 3Ph + PE + n 50Hz (TBD)

Control power supply: DC 24V

Full load power supply: 230kw / 175kW

Recommended maximum fuse size: 225A / 135a

 

Installation requirements

Minimum ground bearing capacity: 750KG / ㎡

Minimum workshop height: 3.5m

Clean room level: iso7 (10K class)

Ambient temperature: 17 ℃＜ RT ＜ 30 ℃

Maximum humidity: 70%